1～3 item / All 3 items
Device dimensions: 1200W × 1100D × 2000H (200CBT) / 1500W × 1100D × 2000H (300CBT)
Set the substrate in the chuck manually, then perform paddle development, rinsing, and spin drying.
Device dimensions: 1700W × 1300D × 1400H
Set the substrate manually in the chuck, then perform paddle development, rinsing, and spin drying. A canister can be stored on the side of the main unit.
Device dimensions: 2000W × 1200D × 2000H (200WCBT) / 2000W × 1500D × 2000H (300WCBT)
This is a sheet-type automatic spin developing device that sets the set in the loader, transports the substrate with a clean robot, and performs paddle development, rinsing, and spin drying. It can accommodate two chemical supply tanks or waste liquid tanks (20L) on the side of the main body.
